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Location: Home > About Us > Directors

CHEN Dapeng(Vice-Director)
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Update time: 2011-08-10
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NAME: CHEN Dapeng (Ph.D) 

Title: Professor

Phone: +86-010-882995558

Fax:+86-010-82995558

E-mail: dpchen@ime.ac.cn 

RESEARCH INTERESTS:   

Sensors, microsystem, Nanofabrication, CMOS process & device

EDUCATION BACKGROUND:   

Ph.D degree, University of Sciences and technology of China (USTC).

PROFESSIONAL EXPERIENCES:   

From 1998 to now, Prof. Chen has been working at the Institute of Microelectronics Chinese Academy of Sciences (IMECAS). As the head of CMOS /MEMS department, Prof. Chen works in the field of the X-ray lithography technology, advance lithography mask, uncooled IR FPA imaging system, gas sensors, etc. Prof. Chen is also a pluralistic Ph.D director of USTC and a part time professor at the Graduate School of Chinese Academy of Sciences.

PROJECTS   

863 Project--- Study on MEMS multisensor and sensor array  

863 Project---Research of maskless lithography system

863 Project---Lower cost non-cooling IR FPA based on CMOS process

NNSF Project--- Research of Cantilever with Micro-probe array processing and its application

NNSF Project--- New Optical readout non -cooling infrared imaging system

CAS project---- MEMS flexible smart skin study

CAS project----Wireless sensors net: uncooled IR imagine sensor

CAS project----key technology research of 3mm X-ray lithography

CAS project---- X-ray lithography utilizing technology research in 8mm MMIC device

COPYRIGHT (C) 2007 Microelectronice of Chinese Academy of Sciences. ALL RIGHT RESSRVED