NAME: CHEN Dapeng (Ph.D)
Sensors, microsystem, Nanofabrication, CMOS process & device
Ph.D degree, University of Sciences and technology of China (USTC).
From 1998 to now, Prof. Chen has been working at the Institute of Microelectronics Chinese Academy of Sciences (IMECAS). As the head of CMOS /MEMS department, Prof. Chen works in the field of the X-ray lithography technology, advance lithography mask, uncooled IR FPA imaging system, gas sensors, etc. Prof. Chen is also a pluralistic Ph.D director of USTC and a part time professor at the Graduate School of Chinese Academy of Sciences.
863 Project--- Study on MEMS multisensor and sensor array
863 Project---Research of maskless lithography system
863 Project---Lower cost non-cooling IR FPA based on CMOS process
NNSF Project--- Research of Cantilever with Micro-probe array processing and its application
NNSF Project--- New Optical readout non -cooling infrared imaging system
CAS project---- MEMS flexible smart skin study
CAS project----Wireless sensors net: uncooled IR imagine sensor
CAS project----key technology research of 3mm X-ray lithography
CAS project---- X-ray lithography utilizing technology research in 8mm MMIC device