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Location: Home > Research > Research Progress

China's Leading Silicon Photonics Platform and MEMS Process Platform Developed in IMECAS
Author: Dan
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Update time: 2017-07-07
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Recently, the Integrated Circuit Advanced Process Center of IMECAS (Institute of Microelectronics of the Chinese Academy of Sciences) released silicon photonics platform and MEMS (Micro Electromechanical System) process platform based on 8-inch CMOS (Complementary Metal Oxide Semiconductor) process line. It marks a significant increase in R & D capability in the field of silicon photonics and MEMS in China.

Silicon photonics technology is a new technology developed under the trend of integration of microelectronics and optoelectronics in the post Moore Era. It utilizes mature CMOS technology and platform, and develops optoelectronic devices and chips based on silicon-based materials. Silicon photonics not only has the urgent application demand in the field of optical communication and optical interconnection, but also is the potential technology to realize the optical interconnection and optical computer in the future. For a long time, China lacks the perfect silicon photonic technology platform, which restricts the development of silicon photonics technology to a great extent.

From the year of 2015, IMECAS has begun to develop silicon photonics process technology based on the 8-inch CMOS process line. The Institute has developed a complete set of silicon photonic process modules. A series of silicon photonic devices including single-mode waveguide, Y branch, optical cross device, coupled grating, tunable attenuator, germanium detector and modulator have been successfully demonstrated. So far the PDK (Process Design Kit) based on the platform has been released. The Institute is providing the service of MPW (Multi Project Wafer) process for domestic customers.

This silicon photonics platform is the first platform which provides a complete process of silicon photonic chip. It will change the situation that the silicon photonic chips in China are basically produced abroad.

Waveguide (Image by IMECAS)

Grating (Image by IMECAS)

Y Branch (Image by IMECAS)

Ge Detector (Image by IMECAS)

 

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