NAME:　OU Yi (PhD)
Title: Associate Professor
phone: (010) 882995560
fax: (010) 82995558
E-mail: ouyi@ime.ac.cn

RESEARCH INTERESTS:
Micro-electromechanical Systems（MEMS）

PROFESSIONAL EXPERIENCES:
2003-present　 Department of Silicon Devices and Integrated Technology, Institute of Microelectronics Chinese Academy of Science

PROJECTS AND SUBJECTS PARTICIPATED:
863 Project--- Study on MEMS multisensor and sensor array
973Project--- Research of reflected liquid crystal micro-display material and device
　　　Investigation of OLED based on silicon and its physics study
NNSF Project--- Research of Cantilever with Micro-probe array processing and its application
　　　New Optical readout non -cooling infrared imaging system
CAS project---- MEMS flexible smart skin study

RECENT PUBLICATIONS:
[1] Ou Yi, Song Yu-long, Liu Ming. Experimental study on reflective layer of LCOS. Chinese journal of liquid crystal and displays. Vol.20,No.6,2005.pp 554-557.
[2] Ou Yi, Li Da-Yong, Liu Ming. Theoretical analysis of photo generated leakage current of p-n junctions in LCOS. Chinese journal of liquid crystal and displays. Vol.21,No.1,2006.pp 24-28.
[3] Ou Yi, Chen Da peng. MEMS and intelligentized microsystem. Equipment for electronic products manufacturing, No.1, 2005,pp.10-14
[4] Ou Yi, Wang Guan-ya. Finite element analysis of photomask heating due to electron beam patting. 2005 13th National Conference on Electron,Ion, and Photon Beam Proceedings. Beijing ,China. 2005.12 pp 88-91
[5] Ou Yi, Sun Yu-nan, Chen Da-peng, Cui Fang. Simulation of electric-mechanical characteristics of micromechanical device Fabry-Perot Cavity on silicon. Acta Photonica Sinica. Vol.35,No.3, 2006.3,pp362-364
[6] Ou Yi, Shi Sha-li, Li Chao-bo.Research on etching and releasing of MEMS devices.The Proceedings of the 14th National conference on Integrated Circuit and Silicon Materials. Zhuhai,China. 2005,11,pp117-120
[7] Ou Yi, Sun Yu-nan, Cui Fang, Cui Jian-min. The micromachine F-P cavity variable attenuator on silicon. Vol.30, No.Z1, 2001, pp 101-104
[8] Ou Yi, Sun Yu-nan, Cui Fang, Cui Jian-min. Finite Element Analysis of the Structure and Electric Fields for a Micromachined Fabry-Perot Cavity on Silicon. Journal of Beijing Institute of Technology (Natural science edition). Vol.22,No 4, 2002,8,pp437-440
[9] Ou Yi, Cui Fang, Sun YunNan. Tunable Filter with Micromachine F-P Cavity on the Silicon. SPIE,Vol,4927,2002, pp857-863
[10] Ou Yi, SunYu-nan, Cui Fang, Cui Jiammin. Analysis for the variable attenuator optical property of silicon micromachine F-P cavity. Optical Technique. Vol.28, No.3, 2002,5, pp210-212
[11] Ou Yi , Cui Fang , Sun Yu-nan. The crosstalk analysis for Micromachined tunable Fabry-Perot filters in DWDM system. Acta Photonica Sinica. Vol.32, No.9. 2003,9, pp 1110-1112

PATENTS:
[1]A deactivation method of protecting reflective electrode of LCOS (Application No. 200510062485.8)
[2]A fabrication method of tunable optical filter based on MEMS (Application No. 200510062484.3)
[3]Fabrication of vibrational jet flow actuator based on MEMS (Application No. 200510086971.3)
[4]Fabricating anode and separator of cathode in OLED based on silicon (Application No. 200510123888.9)
[5]Improving smoothness of reflective plate in the micro-mechanical un-cooled infrared imaging system (Application No. 200710178317.4)
[6]Fabricating optical demultiplexer based on MEMS technology (Application No. 200710064865.4)
[7]Un-contacted infrared temperature alarm of MEMS (Application No. 200710064868.8)