Name:ZHU Xiaoli
Gender:Male
Title:Associate Professor
Nationality:P.R.China
Education:Ph.D
E-Mai:zhuxiaoli@ime.ac.cn
Address:3 Beitucheng West Road, Chaoyang District, Beijing, PR China
Postcode:100029
Tel:86-010-82995585
Fax:86-010-82995583

Education Background:
2008.10-2010.12 Post doctor in Materials Science & Engineering, Tsinghua University
2005.09–2008.07 Ph.D. in Microelectronics and Solid State Electronics, Institute of Microelectronics, Chinese Academy of Sciences;
2002.09–2005.07 M.S. in Optics, Institute of Laser Engineering, Beijing University of Technology;
M.S. & Ph.D. in Microelectronics and Solid State Electronics, Institute of Microelectronics, Chinese Academy of Sciences.

Professional Experience:
2008.07- Now Microelectronics and Solid State Electronics, Institute of Microelectronics, Chinese Academy of Sciences.

Research Interests:
Micro and Nano Fabrication and methodologies, Micro/nano optical elements, Advanced lithography

Publications:
1. ZHU Xiao-Li, XIE Chang-Qing, ZHANG Man-Hong et al, “Fabrication of 11-nm-Wide Silica-Like Lines Using X-Ray Diffraction Exposure”, CHIN. PHYS. LETT. Vol. 26, No. 8 (2009) 086803.
2. X. L. Zhu, S.B. Liu，B. Y. Man，C. Q. Xie，D. P. Chen，D. Q. Wang, T. C. Ye, M. Liu，“Analysis by Using X-Ray Photoelectron Spectroscopy for Polymethyl Methacrylate and Polytetrafluoroethylene etched by KrF Excimer Laser”，Applied Surface Science， 253 ，2007，P. 3122–3126；
3. Xiaoli Zhu, Changqing Xie, Tianchun Ye et al, “Fabrication of 200 nm period x-ray transmission gratings using electron beam lithography”. Proc. of SPIE, Vol. 6832, 2007, 68320V;
4. Min Zhao，XiaoLi Zhu，Baoqin Chen et al. Design, fabrication, and test of soft x-ray sinusoidal transmission grating. Optical Engineering, 2008, 47(5):058001.
5. Changqing Xie, Xiaoli Zhu, Lina Shi, and Ming Liu, “Spiral photon sieves apodized by digital prolate spheroidal window for the generation of hard-x-ray vortex”, OPTICS LETTERS, Vol. 35(11) 2010 , 1765.

 
Honours:
Beijing Science & Technology Award.