Name:ZONG Mingcheng Gender:Male Title:Prof. Dr. E-Mail:zongmingcheng@ime.ac.cn Department:Microelectronic Equipment Technology Department Address:3 Beitucheng West Road, Chaoyang District, Beijing, PR China Postcode:100029 Tel:+86-10-82995870 Fax:+86-10-82995870
Education Background: 1986–1989: Ph. D. degree in Applied Physics, major in Optics, Tsinghua University, Beijing, China. 1983–1986: Master degree in Electronic Engineering, major in Electronic Physics and Device, Southeast University, Nanjing, China. 1979–1983: Bachelor degree in Electronic Engineering, major in Optoelectronics, Southeast University, Nanjing, China.
Professional Experience: 2011.04 – present: Professor at IMECAS (Institute of Microelectronics of Chinese Academy of Sciences). 2009.05– 2011.03: Director at Philips Lighting R&D Center (China). 2000.01–2009.04: R&D Project Manager & Sr. Engineer at ASML, The Netherlands. 1999.02–1999.12: Researcher at FOM institute AMOLF, The Netherlands. 1998.02–1999.01: Researcher at Delft University of Technology, The Netherlands. 1990.01 – 1998.01: Department head and Full Professor at Beijing Jiaotong University, China.
Research Interests: Optical Lithography, Optical Engineering, Metrology, Fine Testing & Control Technology and EUV Technology.
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