NAME:CHEN Dapeng (Ph.D)
Title: Professor
phone: 86-010- 882995558
fax: 86-010- 82995558
E-mail: dpchen@ime.ac.cn

RESEARCH INTERESTS:
Sensors, Microsystem，Nanofabrication，CMOS process & Device

EDUCATION BACKGROUND:
Ph.D degree, University of Sciences and technology of China(USTC).


PROFESSIONAL EXPERIENCES:
From 1998 to now, Prof. Chen has been working at the Institute of Microelectronics Chinese Academy of Sciences (IMECAS). As the head of CMOS /MEMS department, Ph.D Chen works in the field of the X-ray lithography technology, advance lithography mask, uncooled IR FPA imaging system, gas sensors, etc. Prof. Chen is also a pluralistic Ph.D director of USTC, and a part time professor of Graduate School of Chinese Academy of Sciences.

PROJECTS：
863 Project--- Study on MEMS multisensor and sensor array
863 Project---Research of maskless lithography system
863 Project---Lower cost non-cooling IR FPA based on CMOS process
NNSF Project--- Research of Cantilever with Micro-probe array processing and its application
NNSF Project--- New Optical readout non -cooling infrared imaging system
CAS project---- MEMS flexible smart skin study
CAS project----Wireless sensors net: uncooled IR imagine sensor
CAS project----key technology research of 3mm X-ray lithography
CAS project---- X-ray lithography utilizing technology research in 8mm MMIC device