Name：WEI Yayi
Gender：Male

Title：Professor

Education：Ph.D

E-Mail：weiyayi@ime.ac.cn 

Department：Integrated Circuit Advanced Process Center

Address：3 Beitucheng West Road, Chaoyang District, Beijing, PR China

Postcode：100029

Tel：+86-10-82995898

Fax：+86-10-82995684

Education Background：

•Ph.D., 1998，Max-Planck-Institute for Solid State Research/ University of Stuttgart, Germany

•Master, 1992, Institute of Electronics, Chinese Academy of Sciences, Beijing, China

Professional  Experience：

2013–Present：Professor, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China

2009–2013：GLOBALFOUNDRIES, Malta, USA

2007–2008：AZ Electronic Materials USA Corp, Somerville, NJ

2001–2007：Infineon/Qimonda North America, Hopewell Junction, NY

Research Interests：

193nm immersion lithography process; Optical proximity collection）; Development and evaluation of litho materials; Development of litho equipment (track).

Publications：

Advanced processes for 193nm immersion lithography， SPIE Press 2009