Name:LI Shiguang
Gender:Female
Title:Associate Professor
Nationality:P.R.China
Education:Doctor of Engineering
E-Mail:lishiguang@ime.ac.cn
Department :Equipment center
Address :3 Beitucheng West Road, Chaoyang District, Beijing, PR China
Postcode:100029
Education Background:
09/1989~07/1993 Harbin Institute of Technology, Optical instrumentation, Bachelor
09/1993 ~03/1996 Harbin Institute of Technology, Optical instrumentation, Master
09/2000~07/2005 Tsinghua University, Optical engineering, PhD
Professional Experience:
04/1996 – 01/1998, Beijing Institute of Space and Mechanics, Assistant engineer
12/2005–11/2009, Singapore-MIT Alliance, Singapore，Research Fellow
03/2010–05/2011, the University of North Carolina, USA，Post doctor 10/2011–now, Institute of Microelectronics, Chinese Academy of Sciences, Associate Professor
02/2016–now, Donfang Jingyuan (Beijing) Electron Limited, Project manager, Project overseer
Research Interests:
Opto-electrical technology, Optical engineering, Optical measurement technology
Publications:
29 papers on Journals and Conferences, some of which are listed:
[1] Sun YW, Li SG, Zong MC, Nanoscale Focusing and Leveling Measurement Technology Based on Optical Spatial Split, Acta Optica Sinica, 2016（5）(Chinese)
[2] Sun YW, Li SG, Ye TC, Zong MC, Process Dependency of Focusing and Leveling Measurement System in Nanoscale Lithography, Acta Optica Sinica, 2016（8）(Chinese)
[3] Li S G, Xu Z G, Yoon S F and Fang Z P, Feasibility study on bonding quality inspection of microfluidic devices by optics coherence tomography, J. of Biomedical Opt., 2011, 16(6): 066011
[4] Li S G, K. D. Mohan, W. W. Sanders and A. L. Oldenburg. "Toward soft-tissue elastography using digital holography to monitor surface acoustic waves." Journal of Biomedical Optics, 16(11):116005 (2011)
[5] Li S G, Liu J, Nguyen N T, Fang Z P, Yoon S F, Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy, Applied Optics, 2009, 48 (33): 6432-6441
[6] Li S G, Thorsen T, Xu Z G, Fang Z P, Yoon S F, Microvalve Thickness and Topography Measurements in Microfluidic Devices by White Light Confocal Microscopy, Applied Optics, 2009, 48(27):5088-94
[7] Xu Z G, Li S G, Shilpiekandula V, Taylor H K, Yoon S F, Youcef-Toumi K, Reading I, Fang Z P, Zhao J H, Boning D S. Three-Dimensional Profile Stitching Based on the Fiducial Markers for Microfluidic Devices. Optics Communications, 2009, 282, p493–499
[8] Li S G, Xu Z G, Reading I, Yoon S F, Fang Z P and Zhao J H. Three dimensional sidewall measurements by laser fluorescent confocal microscopy, Opt. Express, 2008, 16: 4001-4014
[9] Li S G, Xu, Z G, Mazzeo A, Burns D J, Fu G, Dirckx M, Shilpiekandula V, Chen X, Nayak N C, Wong E, Yoon S F, Fang Z P, Youcef-Toumi K, Hardt D, Tor S B, Yue C Y and Chun J H. Review of production of microfluidic devices: material, manufacturing and metrology, 2008, France, SPIE 6993: 69930F-1-12
[10] Taylor H K, Xu Z G, Li S G, Youcef-Toumi K, Yoon S F, and Boning D S, Moire fringe method for the measurement of distortions of hot-embossed polymeric substrates, 2008, Singapore, SPIE 7155: 715528-715528-9
[11] Li S G, Fu Gang, Reading Ivan, Tor S B, Loh N H, Chaturvedi P, Yoon S F, and Youcef-Toumi K. Dimensional variation in production of high-aspect-ratio micro-pillars array by micro powder injection molding. Applied Physics A, 2007, 89: 721-728
[12] Li S G, Yang C X, Zhang E Y, and Jun G F. Dynamic performance of magneto-optical Bi-substituted rare-earth iron garnet. Chin. Opt. Lett., 2005, 3(1): 38-41
[13] Li S G, Yang C X, Zhang E Y, and Jin G F. Compact optical roll angle sensor with large measurement range and high sensitivity. Opt. Lett., 2005, 30(3): 242-244
[14] Li S G, Yang C X, Zhang E Y, and Jun G F. Dynamic performance of magneto-optical Bi-substituted rare-earth iron garnet. Chin. Opt. Lett., 2005, 3(1): 38-41, EI, SCI 0.968
Patents Application:
201410374962.3, A level sensor apparatus (Chinese)
201410676554.3, An alignment apparatus for plane-convex lens assembling
201410718598.8, A vertical adjustment apparatus
201210479101, An EUV source pollution collection apparatus
03150120, A polarization dispersion compensation system
Projects and Subjects Participated:
[1] 86ps dynamic range, 6 bits, high speed and programmable polarization dispersion compensator;
[2] System requirements and specifications analysis and evaluation of immersion lithography tool;
[3] EUV lithography tool’s architecture and key technologies;
[4] Infrared target simulator and its optical imaging system;
[5] High resolution space camera development;
[6] Metrology and Inspection of polymer based microfluidic devices in high volume, high speed production environments;
[7] soft-tissue elastography using digital holography to monitor surface acoustic waves
[8] Z sensor development in electron beam inspection system
[9] large scale, high sensitive and compact optical roll angle sensor development
