Name

ZHANG Zili

Gender

Female

Title

Professor

Nationality

Chinese

Education

PhD

E-Mail

zhangzili@ime.ac.cn

Department

Optoelectronics Research Center

Address

3 Beitucheng West Road, Chaoyang District, Beijing, PR China

Postcode

100029

Tel

010-82178675

Fax

Education Background

2005-2010, PhD in Measurement Science and Technology, Tianjin University

2000 -2005, Bachelor in Biomedical Engineering, Tianjin University

Professional Experience

Sept. 2022-Present, Professor, Institute of Microelectronics, Chinese Academy of Sciences.

Nov. 2018-Sept. 2022, Associate Professor, Institute of Microelectronics, Chinese Academy of Sciences.

Dec. 2014-Nov. 2018, Associate Professor, Academy of Opto-Electronics, Chinese Academy of Sciences.

Sept. 2010–Dec. 2014, Assistant Researcher, Academy of Opto-Electronics, Chinese Academy of Sciences.

Publications

More than 30 papers. The papers selected are listed below:

[1] Fanchang Meng, Zili Zhang*, Yanhui Kang, Yao Li, Peng Wang, Chengjun Cui, Shan Wang, and Weihu Zhou, Height measurement of microbumps using a white-light triangulation method[J], Appl. Opt. 61:2036-2044,2022.

[2] WANG SHAN, ZHANG ZILI*, MENG FANCHANG, WANG PENG，Height displacement sensing system based on varied period plane diffraction grating[J]，OPTOELECTRONICS AND ADVANCED MATERIALS – RAPID COMMUNICATIONS, 15:11-12,2021

[3] Gao Huiping, Xu Guili, Zhang Zili, Zhou Weihu, Wu Quan. A novel probability iterative closest point with normal vector algorithm for robust rail profile registration[J]. Optik,2021,243:166936.

[4] WANG Peng, MENG Fanchang, ZHANG Zili*, WANG Dezhao, WANG Shan, YAO Entao, WANG Lei, and YE Ruiqian. A Bump Height Measurement Method Based on Optical Triangulation[J]. Acta Photonica Sinica, 2022, 51(5): 0512001.

[5] YE Ruiqian, ZHENG Peng, WANG Lei, ZHANG Zili and MENG Fanchang. Simulation Research on Height Measurement of Bump Package Based on White Light Triangulation Method[J]. Optics & Optoelectronic Technology, 20(1):43-49, 2022 .

[6] CAI Chao, LIU Wenbo, ZHENG Xiangai, MENG Fanchang, ZHANG Zili*, ZHOU Weihu and LI Yajie. Fast Phase-based Stereo Matching Based on Multi-scale Analysis[J]. Semiconductor Optoelectronics, 41(6): 767-772, 2020.

[7] Chengtao Ma, Fanchang Meng, Yangkuan Guo, Yajie Li, Zili Zhang*, An improved method of corner point extraction used in grating projection phase measurement[C], Proc, SPIE 11567, Applied Optics and Photonics China(AOPC 2020): Optical Sensing and Imaging Technology, 1156738(2020); doi:10.1117/12.2580132, Beijing, China, 5th November, 2020.

[8] Fanchang Meng, Zili Zhang*, Can Hao, Jia Deng, Weihu Zhou. Real-time dynamic measurement of geometric parameters of catenary. 8th Applied Optics and Photonics China[C]，7-9 July, 2019.

[9] Wang Qiyue*, Zhang Zili, Wang Zhongyu, Wang Yanqing, Zhou Weihu, The trajectory prediction of spacecraft by grey method [J]. Measurement Science and Technology, 2016, 27(8): 085011.

[10] ZHANG Zili, ZHU Han, ZHOU Weihu, Error calibration and correction of mirror tilt in laser trackers [J] Optics and Precision Enginnering, 2015, 23(05):1205-1212.

Research Interests  

Precision instrument design and system integration

Integrated circuit optical detection technology

Laser and optoelectronic measurement technology

Machine vision and application

Projects and Subjects Participated

1. Jan. 2020, Project leader of ‘Development and application of online visual inspection equipment for chip packaging defects’, National Key R&D Program of China.

2. Jan. 2021, Sub-project leader of ‘Optical profilometer’, **engineering project.

3. Jan. 2021, In charge of Software, Error correction and Accuracy Evaluation of ‘ 3-DOF laser tracker’, engineering project.

4. Oct. 2020, In charge of Software, Error correction and Accuracy Evaluation of ‘6-DOF laser tracker engineering prototype’, engineering project.

5. Jan. 2020, core technicians of ‘Chip integration development’.

6. Nov. 2020, Project leader of ‘Development of laser profile detection sensor prototype for domestic rail flaw detection vehicle’.

7. Jan. 2017, Project leader of ‘Simulation and verification test platform for high-speed rail crack inspection’.

8. July 2016, In charge of laser scanning system of ‘Industrial demonstrational application of laser strengthening technology in the fields of aerospace and rail transit’, National Key R&D Program of China.

9. Aug. 2015, Project leader of ‘Development of application system of wide-view high-precision 3D measuring instrument’.

10. Jan. 2015, Project leader of ‘Research on the key technology of laser tracker accuracy theory’.

Patents Application

Applied for more than 30 patents, including more than 20 granted patents. Some granted patents:

[1] F Meng, Z Zhang, R Ji, C Cui, Y Pan, J Zhang, D Dong, W Zhou. Micro-bump height measuring device based on constant cross ratio. ZL202022979855.7. 2021-6-18.

[2]. F Meng, Z Zhang, C Cui, R Ji, G Li, Y Pan, D Dong, W Zhou. A device for measuring height of micro-bumps. ZL202120919049.2. 2021-11-12.

[3]. Y Pan, R Ji, Z Zhang, A low repetition rate Er-doped femtosecond fiber laser. ZL 202022497228.X. 2021-04-20.

[4]. D Dong, W Zhou, X Liu, X Lin, R Ji, D Lao, Z Zhang. A communication control circuit of laser tracker. ZL201510112528.2, 2019-04-19.

[5]. S Gao, R Ji, W Zhou, D Dong, D Lao, Z Zhang, J Yuan, J Shi, X Liu, G Wang, Y Wang, Z Cheng, A high-recision laser ranging device and measuring method. ZL201610221712.5. 2017-11-28.

[6]. J Yang, D Dong, W Zhou, D Lao, R Ji, Z Zhang, J Yuan, J Shi, Y Wang, B Fan, G Wang, Z Cheng, Z Zhu, A transformation calibration method and system of manipulator coordinate system. ZL201710743278.1. 2019-12-24.

[7]. D Dong, W Zhou, R Ji, X Liu, Z Cheng, X Lin, Z Zhang, D Lao, A synchronous data acquisition and communication circuit.  201510112530.X. 2018-02-23.

[8]. X Lin, D Dong, W Zhou, X Liu, R Ji, D Lao, Z Zhang, A method for online searching and compensation of mechanical zero of permanent magnet synchronous motor. ZL201510108942.6. 2017-7-14.

[9]. D Lao, C Cui, W Zhou, G Wang, R Ji, D Dong, Z Zhang, J Yuan, J Shi, Y Wang, An optical axis geometric error calibration device for femtosecond laser tracker. ZL201610533796.6. 2019-3-8.

[10]. D Lao, W Zhou, C Cui, C Hao, G Wang, R Ji, D Dong, Z Zhang, J Yuan, X Liu, Y Wang, J Shi, B Fan, A multi-wavelength multi-optical axis parallelism detection device and detection method. ZL201510996675.0. 2017-10-31.

Honour  

Award:

1. Special Prize for Technological Invention Award for Science and Technology of Machinery Industry in Nov. 2020.

2. First Prize for Science and Technology Progress Award for Science and Technology of Machinery Industry in Oct. 2022.

Work Honor:

1. ‘Excellent employee’ in Academy of Opto-electronics, Chinese Academy of Sciences in 2011.

2. Excellent assessment in Institute of Microelectronics of the Chinese Academy of Sciences in 2020.

3. Excellent assessment in Institute of Microelectronics of the Chinese Academy of Sciences in 2021.